In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

por Tokel, Onur, Turnali, Ahmet, Makey, Ghaith, Elahi, Parviz, Çolakoğlu, Tahir, Ergeçen, Emre, Yavuz, Özgün, Hübner, René, Borra, Mona Zolfaghari, Pavlov, Ihor, Bek, Alpan, Turan, Raşit, Kesim, Denizhan Koray, Tozburun, Serhat, Ilday, Serim, Ilday, F. Ömer
Publicado 2017