Mechanical and Optical Properties of Cr(2)O(3) Thin Films Grown by Atomic Layer Deposition Method Using Cr(thd)(3) and Ozone

por Salari Mehr, Mahtab, Aarik, Lauri, Jõgiaas, Taivo, Kasikov, Aarne, Damerchi, Elyad, Mändar, Hugo
Publicado 2023

Structure and Electrical Behavior of Hafnium-Praseodymium Oxide Thin Films Grown by Atomic Layer Deposition

por Kukli, Kaupo, Aarik, Lauri, Vinuesa, Guillermo, Dueñas, Salvador, Castán, Helena, García, Héctor, Kasikov, Aarne, Ritslaid, Peeter, Piirsoo, Helle-Mai, Aarik, Jaan
Publicado 2022