Mixed-Substituted Single-Source Precursors for Si(1–x)Ge(x) Thin Film Deposition

por Köstler, Benedikt, Jungwirth, Felix, Achenbach, Luisa, Sistani, Masiar, Bolte, Michael, Lerner, Hans-Wolfram, Albert, Philipp, Wagner, Matthias, Barth, Sven
Publicado 2022