Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

por Algamili, Abdullah S., Khir, Mohd Haris, Ahmed, Abdelaziz Y., Rabih, Almur A., Ba-Hashwan, Saeed S., Alabsi, Sami S., Al-Mahdi, Osamah L., Isyaku, Usman B., Ahmed, Mawahib G., Junaid, Muhammad
Publicado 2022