A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

por Algamili, Abdullah Saleh, Khir, Mohd Haris Md., Dennis, John Ojur, Ahmed, Abdelaziz Yousif, Alabsi, Sami Sultan, Ba Hashwan, Saeed Salem, Junaid, Mohammed M.
Publicado 2021

Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor

por Algamili, Abdullah S., Khir, Mohd Haris, Ahmed, Abdelaziz Y., Rabih, Almur A., Ba-Hashwan, Saeed S., Alabsi, Sami S., Al-Mahdi, Osamah L., Isyaku, Usman B., Ahmed, Mawahib G., Junaid, Muhammad
Publicado 2022

A review of piezoelectric MEMS sensors and actuators for gas detection application

por Ba Hashwan, Saeed S., Khir, Mohd Haris Md., Nawi, Illani Mohd, Ahmad, Mohamad Radzi, Hanif, Mehwish, Zahoor, Furqan, Al-Douri, Y., Algamili, Abdullah Saleh, Bature, Usman Isyaku, Alabsi, Sami Sultan, Sabbea, Mohammed O. Ba, Junaid, Muhammad
Publicado 2023