CALPHAD-Based Modelling of the Temperature–Composition–Structure Relationship during Physical Vapor Deposition of Mg-Ca Thin Films

por Keuter, Philipp, to Baben, Moritz, Aliramaji, Shamsa, Schneider, Jochen M.
Publicado 2023

Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films

por Aliramaji, Shamsa, Keuter, Philipp, Neuß, Deborah, Hans, Marcus, Primetzhofer, Daniel, Depla, Diederik, Schneider, Jochen M.
Publicado 2023