Capacitive Based Micromachined Resonators for Low Level Mass Detection

por Nathani, Muhammad Umair, Nazemi, Haleh, Love, Calvin, Babu Lopez, Yameema, Swaminathan, Siddharth, Emadi, Arezoo
Publicado 2020

Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers—CMUT and PMUT

por Nazemi, Haleh, Antony Balasingam, Jenitha, Swaminathan, Siddharth, Ambrose, Kenson, Nathani, Muhammad Umair, Ahmadi, Tara, Babu Lopez, Yameema, Emadi, Arezoo
Publicado 2020