An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

por Barbin, Evgenii, Nesterenko, Tamara, Koleda, Aleksei, Shesterikov, Evgeniy, Kulinich, Ivan, Kokolov, Andrey
Publicado 2023