Investigation of the Young’s Modulus and the Residual Stress of 4H-SiC Circular Membranes on 4H-SiC Substrates

por Ben Messaoud, Jaweb, Michaud, Jean-François, Certon, Dominique, Camarda, Massimo, Piluso, Nicolò, Colin, Laurent, Barcella, Flavien, Alquier, Daniel
Publicado 2019