Epitaxial Growth of Sc(0.09)Al(0.91)N and Sc(0.18)Al(0.82)N Thin Films on Sapphire Substrates by Magnetron Sputtering for Surface Acoustic Waves Applications

por Bartoli, Florian, Streque, Jérémy, Ghanbaja, Jaafar, Pigeat, Philippe, Boulet, Pascal, Hage-Ali, Sami, Naumenko, Natalya, Redjaïmia, A., Aubert, Thierry, Elmazria, Omar
Publicado 2020