Conformal Growth of Nanometer-Thick Transition Metal Dichalcogenide TiS(x)-NbS(x) Heterostructures over 3D Substrates by Atomic Layer Deposition: Implications for Device Fabricatio...

por Basuvalingam, Saravana Balaji, Bloodgood, Matthew A., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Bol, Ageeth A.
Publicado 2021

Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition

por Basuvalingam, Saravana Balaji, Zhang, Yue, Bloodgood, Matthew A., Godiksen, Rasmus H., Curto, Alberto G., Hofmann, Jan P., Verheijen, Marcel A., Kessels, Wilhelmus M. M., Bol, Ageeth A.
Publicado 2019