Thermal Actuation Based 3-DoF Non-Resonant Microgyroscope Using MetalMUMPs

por Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed, Kraft, Michael, Lai, Yongjun, Masood ul Hassan, Muhammad
Publicado 2009

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

por Saleem, Muhammad Mubasher, Saghir, Shayaan, Bukhari, Syed Ali Raza, Hamza, Amir, Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed
Publicado 2021