A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

por Jonker, D., Jafari, Z., Winczewski, J. P., Eyovge, C., Berenschot, J. W., Tas, N. R., Gardeniers, J. G. E., De Leon, I., Susarrey-Arce, A.
Publicado 2021