Short-Pulse Laser-Assisted Fabrication of a Si-SiO(2) Microcooling Device

por Mouskeftaras, Alexandros, Beurthey, Stephan, Cogan, Julien, Hallewell, Gregory, Leroy, Olivier, Grojo, David, Perrin-Terrin, Mathieu
Publicado 2021

Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices

por Bargiel, Sylwester, Cogan, Julien, Queste, Samuel, Oliveri, Stefania, Gauthier-Manuel, Ludovic, Raschetti, Marina, Leroy, Olivier, Beurthey, Stéphan, Perrin-Terrin, Mathieu
Publicado 2023