Contribution of Ribbon-Structured SiO(2) Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators

por Moutaouekkil, Mohammed, Streque, Jérémy, Marbouh, Othmane, El Boudouti, El Houssaine, Elmazria, Omar, Pernod, Philippe, Bou Matar, Olivier, Talbi, Abdelkrim
Publicado 2023