Plasma Enhanced High-Rate Deposition of Advanced Film Materials by Metal Reactive Evaporation in Organosilicon Vapors

por Menshakov, Andrey, Bruhanova, Yulia, Skorynina, Polina, Medvedev, Anatoliy
Publicado 2023

Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge

por Menshakov, Andrey I., Bruhanova, Yulia A., Kukharenko, Andrey I., Zhidkov, Ivan S.
Publicado 2022