Carrier Trap Density Reduction at SiO(2)/4H-Silicon Carbide Interface with Annealing Processes in Phosphoryl Chloride and Nitride Oxide Atmospheres

por Brzozowski, Ernest, Kaminski, Maciej, Taube, Andrzej, Sadowski, Oskar, Krol, Krystian, Guziewicz, Marek
Publicado 2023