Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

por Bukhari, Syed Ali Raza, Saleem, Muhammad Mubasher, Khan, Umar Shahbaz, Hamza, Amir, Iqbal, Javaid, Shakoor, Rana Iqtidar
Publicado 2020

A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

por Saleem, Muhammad Mubasher, Saghir, Shayaan, Bukhari, Syed Ali Raza, Hamza, Amir, Shakoor, Rana Iqtidar, Bazaz, Shafaat Ahmed
Publicado 2021