Unraveling the Mechanism of Maskless Nanopatterning of Black Silicon by CF(4)/H(2) Plasma Reactive-Ion Etching

por Ghezzi, Francesco, Pedroni, Matteo, Kovač, Janez, Causa, Federica, Cremona, Anna, Anderle, Mariano, Caniello, Roberto, Pietralunga, Silvia M., Vassallo, Espedito
Publicado 2022