Enhanced ferroelectric switching speed of Si-doped HfO(2) thin film tailored by oxygen deficiency

por Lee, Kyoungjun, Park, Kunwoo, Lee, Hyun-Jae, Song, Myeong Seop, Lee, Kyu Cheol, Namkung, Jin, Lee, Jun Hee, Park, Jungwon, Chae, Seung Chul
Publicado 2021