Enhancement on the Surface Hydrophobicity and Oleophobicity of an Organosilicon Film by Conformity Deposition and Surface Fluorination Etching

por Xu, Zheng-Wen, Zhang, Yu-Kai, Chen, Tai-Hong, Chang, Jin-How, Lee, Tsung-Hsin, Li, Pei-Yu, Liu, Day-Shan
Publicado 2018