Ferroelectricity and Oxide Reliability of Stacked Hafnium–Zirconium Oxide Devices

por Liao, Ruo-Yin, Chen, Hsuan-Han, Lin, Ping-Yu, Liang, Ting-An, Su, Kuan-Hung, Lin, I-Cheng, Wen, Chen-Hao, Chou, Wu-Ching, Hsu, Hsiao-Hsuan, Cheng, Chun-Hu
Publicado 2023