Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate

por Huang, Chien-Hsin, Lee, Chien-Hsing, Hsieh, Tsung-Min, Tsao, Li-Chi, Wu, Shaoyi, Liou, Jhyy-Cheng, Wang, Ming-Yi, Chen, Li-Che, Yip, Ming-Chuen, Fang, Weileun
Publicado 2011