Novel Self-shrinking Mask for Sub-3 nm Pattern Fabrication

por Yang, Po-Shuan, Cheng, Po-Hsien, Kao, C. Robert, Chen, Miin-Jang
Publicado 2016

Improved characteristics of near-band-edge and deep-level emissions from ZnO nanorod arrays by atomic-layer-deposited Al(2)O(3 )and ZnO shell layers

por Sun, Wen-Cheng, Yeh, Yu-Cheng, Ko, Chung-Ting, He, Hau, Chen, Miin-Jang
Publicado 2011

Room-temperature field effect transistors with metallic ultrathin TiN-based channel prepared by atomic layer delta doping and deposition

por Cheng, Po-Hsien, Wang, Chun-Yuan, Chang, Teng-Jan, Shen, Tsung-Han, Cai, Yu-Syuan, Chen, Miin-Jang
Publicado 2017

AlN epitaxy on SiC by low-temperature atomic layer deposition via layer-by-layer, in situ atomic layer annealing

por Kao, Wei-Chung, Lee, Wei-Hao, Yi, Sheng-Han, Shen, Tsung-Han, Lin, Hsin-Chih, Chen, Miin-Jang
Publicado 2019

Study of Atomic Layer Deposition Nano-Oxide Films on Corrosion Protection of Al-SiC Composites

por Chen, Hou-Jen, Chen, Ying-Chu, Lin, Pi-Chen, Lin, Kaifan, Lin, Jonathan C., Chen, Miin-Jang, Lin, Hsin-Chih
Publicado 2023

Sharp Transformation across Morphotropic Phase Boundary in Sub‐6 nm Wake‐Up‐Free Ferroelectric Films by Atomic Layer Technology

por Chuang, Chun‐Ho, Wang, Ting‐Yun, Chou, Chun‐Yi, Yi, Sheng‐Han, Jiang, Yu‐Sen, Shyue, Jing‐Jong, Chen, Miin‐Jang
Publicado 2023

Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition

por Cheng, Yung-Chen, Wang, Hsiang-Chen, Feng, Shih-Wei, Li, Tsai-Pei, Fung, Siu-Keung, Yuan, Kai-Yun, Chen, Miin-Jang
Publicado 2020

Suppression of GeO(x) interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semi...

por Wang, Chin-I., Chang, Teng-Jan, Wang, Chun-Yuan, Yin, Yu-Tung, Shyue, Jing-Jong, Lin, Hsin-Chih, Chen, Miin-Jang
Publicado 2019

Ultralow threading dislocation density in GaN epilayer on near-strain-free GaN compliant buffer layer and its applications in hetero-epitaxial LEDs

por Shih, Huan-Yu, Shiojiri, Makoto, Chen, Ching-Hsiang, Yu, Sheng-Fu, Ko, Chung-Ting, Yang, Jer-Ren, Lin, Ray-Ming, Chen, Miin-Jang
Publicado 2015

Low-temperature atomic layer epitaxy of AlN ultrathin films by layer-by-layer, in-situ atomic layer annealing

por Shih, Huan-Yu, Lee, Wei-Hao, Kao, Wei-Chung, Chuang, Yung-Chuan, Lin, Ray-Ming, Lin, Hsin-Chih, Shiojiri, Makoto, Chen, Miin-Jang
Publicado 2017

Probing Hydrophilic Interface of Solid/Liquid-Water by Nanoultrasonics

por Mante, Pierre-Adrien, Chen, Chien-Cheng, Wen, Yu-Chieh, Chen, Hui-Yuan, Yang, Szu-Chi, Huang, Yu-Ru, -Ju Chen, I., Chen, Yun-Wen, Gusev, Vitalyi, Chen, Miin-Jang, Kuo, Jer-Lai, Sheu, Jinn-Kong, Sun, Chi-Kuang
Publicado 2014