Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/Mn(2)O(3−x)N/Cu Integration

por Cheng, Yi-Lung, Lin, Yu-Lu, Lee, Chih-Yen, Chen, Giin-Shan, Fang, Jau-Shiung
Publicado 2019

Reliability Characteristics of Metal-Insulator-Semiconductor Capacitors with Low-Dielectric-Constant Materials

por Cheng, Yi-Lung, Peng, Wei-Fan, Huang, Chi-Jia, Chen, Giin-Shan, Fang, Jau-Shiung
Publicado 2023

Comparison of CoW/SiO(2) and CoB/SiO(2) Interconnects from the Perspective of Electrical and Reliability Characteristics

por Cheng, Yi-Lung, Wang, Kai-Hsieh, Lee, Chih-Yen, Chen, Giin-Shan, Fang, Jau-Shiung
Publicado 2023