Comparison of NH(3) and N(2)O Plasma Treatments on Bi(2)O(3) Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure

por Kao, Chyuan-Haur, Chen, Kuan-Lin, Chiu, Yi-Shiang, Hao, Lin Sang, Chen, Shih-Ming, Li, Ming-Hsien, Lee, Ming-Ling, Chen, Hsiang
Publicado 2022