Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD

por Park, Yonggyun, Liu, Pengzhan, Lee, Seunghwan, Cho, Jinill, Joo, Eric, Kim, Hyeong-U, Kim, Taesung
Publicado 2023

Chromism-Integrated Sensors and Devices for Visual Indicators

por Seok, Hyunho, Son, Sihoon, Cho, Jinill, Choi, Sanghwan, Park, Kihong, Kim, Changmin, Jeon, Nari, Kim, Taesung, Kim, Hyeong-U
Publicado 2022

Activation of nitrogen species mixed with Ar and H(2)S plasma for directly N-doped TMD films synthesis

por Cho, Jinill, Seok, Hyunho, Lee, Inkoo, Lee, Jaewon, Kim, Eungchul, Sung, Dougyong, Baek, In-Keun, Lee, Cheol-Hun, Kim, Taesung
Publicado 2022