Enhanced Reliability of a-IGZO TFTs with a Reduced Feature Size and a Clean Etch-Stopper Layer Structure

por Chung, Jae-Moon, Wu, Fang, Jeong, Seung-Woo, Kim, Ji-Hoon, Xiang, Yong
Publicado 2019

Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers

por Chung, Jae-Moon, Zhang, Xiaokun, Shang, Fei, Kim, Ji-Hoon, Wang, Xiao-Lin, Liu, Shuai, Yang, Baoguo, Xiang, Yong
Publicado 2018