Spatial modulation of nanopattern dimensions by combining interference lithography and grayscale-patterned secondary exposure

por Gan, Zhuofei, Feng, Hongtao, Chen, Liyang, Min, Siyi, Liang, Chuwei, Xu, Menghong, Jiang, Zijie, Sun, Zhao, Sun, Chuying, Cui, Dehu, Li, Wen-Di
Publicado 2022

High-fidelity and clean nanotransfer lithography using structure-embedded and electrostatic-adhesive carriers

por Gan, Zhuofei, Cai, Jingxuan, Sun, Zhao, Chen, Liyang, Sun, Chuying, Yu, Junyi, Liang, Zeyu, Min, Siyi, Han, Fei, Liu, Yu, Cheng, Xing, Yu, Shuhui, Cui, Dehu, Li, Wen-Di
Publicado 2023