Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD

por Kalderon, Boaz, Sarkar, Debabrata, Killi, Krushnamurty, Danzig, Tamuz, Azulay, Doron, Millo, Oded, Cohen-Taguri, Gili, Yerushalmi, Roie
Publicado 2021