Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

por Vakarin, Vladyslav, Melati, Daniele, Dinh, Thi Thuy Duong, Le Roux, Xavier, Kan, Warren Kut King, Dupré, Cécilia, Szelag, Bertrand, Monfray, Stéphane, Boeuf, Frédéric, Cheben, Pavel, Cassan, Eric, Marris-Morini, Delphine, Vivien, Laurent, Alonso-Ramos, Carlos Alberto
Publicado 2021