UV-Nanoimprint Lithography for Predefined SERS Nanopatterns Which Are Reproducible at Low Cost and High Throughput

por Milenko, Karolina, Dullo, Firehun Tsige, Thrane, Paul C. V., Skokic, Zeljko, Dirdal, Christopher A.
Publicado 2023

Metasurface Fabrication by Cryogenic and Bosch Deep Reactive Ion Etching

por Baracu, Angela M., Dirdal, Christopher A., Avram, Andrei M., Dinescu, Adrian, Muller, Raluca, Jensen, Geir Uri, Thrane, Paul Conrad Vaagen, Angelskår, Hallvard
Publicado 2021

UV-Nanoimprint and Deep Reactive Ion Etching of High Efficiency Silicon Metalenses: High Throughput at Low Cost with Excellent Resolution and Repeatability

por Dirdal, Christopher A., Milenko, Karolina, Summanwar, Anand, Dullo, Firehun T., Thrane, Paul C. V., Rasoga, Oana, Avram, Andrei M., Dinescu, Adrian, Baracu, Angela M.
Publicado 2023