Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

por Brand, Uwe, Xu, Min, Doering, Lutz, Langfahl-Klabes, Jannick, Behle, Heinrich, Bütefisch, Sebastian, Ahbe, Thomas, Peiner, Erwin, Völlmeke, Stefan, Frank, Thomas, Mickan, Bodo, Kiselev, Ilia, Hauptmannl, Michael, Drexel, Michael
Publicado 2019