High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

por Du, Yi-Jia, Yang, Ting-Ting, Gong, Dong-Dong, Wang, Yi-Cheng, Sun, Xiang-Yu, Qin, Feng, Dai, Gang
Publicado 2018