Fabrication of Microbolometer Arrays Based on Polymorphous Silicon–Germanium

por Jimenez, Ricardo, Moreno, Mario, Torres, Alfonso, Morales, Alfredo, Ponce, Arturo, Ferrusca, Daniel, Rangel-Magdaleno, Jose, Castro-Ramos, Jorge, Hernandez-Perez, Julio, Cano, Eduardo
Publicado 2020