A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

por Shubham, Shubham, Seo, Yoonho, Naderyan, Vahid, Song, Xin, Frank, Anthony J., Johnson, Jeremy Thomas Morley Greenham, da Silva, Mark, Pedersen, Michael
Publicado 2021