Co-dosing Ozone and Deionized Water as Oxidant Precursors of ZnO Thin Film Growth by Atomic Layer Deposition

por Cheng, Yung-Chen, Wang, Hsiang-Chen, Feng, Shih-Wei, Li, Tsai-Pei, Fung, Siu-Keung, Yuan, Kai-Yun, Chen, Miin-Jang
Publicado 2020