An Integrated Evanescent Field Sensor for the Simultaneous Measurement of Layer Refractive Index and Thickness

por Jäger, Matthias, Bruns, Jürgen, Schneidewind, Jessica, Pinnow, Cay, Gargouri, Hassan, Petermann, Klaus
Publicado 2021

Moisture barrier properties of thin organic-inorganic multilayers prepared by plasma-enhanced ALD and CVD in one reactor

por Bülow, Tim, Gargouri, Hassan, Siebert, Mirko, Rudolph, Rolf, Johannes, Hans-Hermann, Kowalsky, Wolfgang
Publicado 2014

Ellipsometry and XPS comparative studies of thermal and plasma enhanced atomic layer deposited Al(2)O(3)-films

por Haeberle, Jörg, Henkel, Karsten, Gargouri, Hassan, Naumann, Franziska, Gruska, Bernd, Arens, Michael, Tallarida, Massimo, Schmeißer, Dieter
Publicado 2013