Anodically Bonded Photoacoustic Transducer: An Approach towards Wafer-Level Optical Gas Sensors

por Gassner, Simon, Schaller, Rainer, Eberl, Matthias, von Koblinski, Carsten, Essing, Simon, Ghaderi, Mohammadamir, Schmitt, Katrin, Wöllenstein, Jürgen
Publicado 2022

Maintaining Transparency of a Heated MEMS Membrane for Enabling Long-Term Optical Measurements on Soot-Containing Exhaust Gas

por Middelburg, Luke M., Ghaderi, Mohammadamir, Bilby, David, Visser, Jaco H., Zhang, Guo Qi, Lundgren, Per, Enoksson, Peter, Wolffenbuttel, Reinoud F.
Publicado 2019