Effect of Imperfections Due to Material Heterogeneity on the Offset of Polysilicon MEMS Structures

por Ghisi, Aldo, Mariani, Stefano
Publicado 2019

Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests

por Mirzazadeh, Ramin, Ghisi, Aldo, Mariani, Stefano
Publicado 2018

Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach

por Mariani, Stefano, Ghisi, Aldo, Corigliano, Alberto, Zerbini, Sarah
Publicado 2009

Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

por Ghisi, Aldo, Mariani, Stefano, Corigliano, Alberto, Zerbini, Sarah
Publicado 2012

Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts

por Mariani, Stefano, Ghisi, Aldo, Corigliano, Alberto, Zerbini, Sarah
Publicado 2007

Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors

por Mariani, Stefano, Ghisi, Aldo, Corigliano, Alberto, Martini, Roberto, Simoni, Barbara
Publicado 2011

A New Approach for the Control and Reduction of Warpage and Residual Stresses in Bonded Wafer

por Farshchi Yazdi, Seyed Amir Fouad, Garavaglia, Matteo, Ghisi, Aldo, Corigliano, Alberto
Publicado 2021

An Experimental and Numerical Study on Glass Frit Wafer-to-Wafer Bonding

por Farshchi Yazdi, Seyed Amir Fouad, Garavaglia, Matteo, Ghisi, Aldo, Corigliano, Alberto
Publicado 2023

MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength

por Vicentini Ferreira do Valle, Tiago, Mariani, Stefano, Ghisi, Aldo, De Masi, Biagio, Rizzini, Francesco, Gattere, Gabriele, Valzasina, Carlo
Publicado 2023