Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates

por Su, Jingxiang, Fichtner, Simon, Ghori, Muhammad Zubair, Wolff, Niklas, Islam, Md. Redwanul, Lotnyk, Andriy, Kaden, Dirk, Niekiel, Florian, Kienle, Lorenz, Wagner, Bernhard, Lofink, Fabian
Publicado 2022