Reactive ion etching of an ovonic threshold switch (OTS) material using hydrogen-based plasmas for non-volatile phase change memories

por Kim, Doo San, Kim, Ju Eun, Gill, You Jung, Park, Jin Woo, Jang, Yun Jong, Kim, Ye Eun, Choi, Hyejin, Kwon, Oik, Yeom, Geun Young
Publicado 2020