Novel Mechanism-Based Descriptors for Extreme Ultraviolet-Induced Photoacid Generation: Key Factors Affecting Extreme Ultraviolet Sensitivity

por Park, Ji Young, Song, Hyun-Ji, Nguyen, Thanh Cuong, Son, Won-Joon, Kim, Daekeon, Song, Giyoung, Hong, Suk-Koo, Go, Heeyoung, Park, Changmin, Jang, Inkook, Kim, Dae Sin
Publicado 2023