PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

por Lisec, Thomas, Behrmann, Ole, Gojdka, Björn
Publicado 2022

Towards Robust Thermal MEMS: Demonstration of a Novel Approach for Solid Thermal Isolation by Substrate-Level Integrated Porous Microstructures

por Behrmann, Ole, Lisec, Thomas, Gojdka, Björn
Publicado 2022

Broadband Zero-Power Wakeup MEMS Device for Energy-Efficient Sensor Nodes

por Ahmed, Minhaz, Dankwort, Torben, Grünzig, Sven, Lange, Volker, Gojdka, Björn
Publicado 2022

Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS

por Bodduluri, Mani Teja, Gojdka, Björn, Wolff, Niklas, Kienle, Lorenz, Lisec, Thomas, Lofink, Fabian
Publicado 2022

Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies

por Bodduluri, Mani Teja, Dankwort, Torben, Lisec, Thomas, Grünzig, Sven, Khare, Anmol, Ahmed, Minhaz, Gojdka, Björn
Publicado 2022

Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets

por Gojdka, Björn, Cichon, Daniel, Lembrecht, Yannik, Bodduluri, Mani Teja, Lisec, Thomas, Stahl-Offergeld, Markus, Hohe, Hans-Peter, Niekiel, Florian
Publicado 2022