Q-Factor Enhancement of Thin-Film Piezoelectric-on-Silicon MEMS Resonator by Phononic Crystal-Reflector Composite Structure

por Liu, Jiacheng, Workie, Temesgen Bailie, Wu, Ting, Wu, Zhaohui, Gong, Keyuan, Bao, Jingfu, Hashimoto, Ken-ya
Publicado 2020