Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

por Moura, Cleverson Alves da Silva, Belmonte, Guilherme Kretzmann, Reddy, Pulikanti Guruprasad, Gonsalves, Kenneth E., Weibel, Daniel Eduardo
Publicado 2018

Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist

por Ghosh, Subrata, Satyanarayana, V. S. V., Pramanick, Bulti, Sharma, Satinder K., Pradeep, Chullikkattil P., Morales-Reyes, Israel, Batina, Nikola, Gonsalves, Kenneth E.
Publicado 2016