Characterization of Structural, Optical, Corrosion, and Mechanical Properties of HfO(2) Thin Films Deposited Using Pulsed DC Magnetron Sputtering

por Mańkowska, Ewa, Mazur, Michał, Kalisz, Małgorzata, Grobelny, Marcin, Domaradzki, Jarosław, Wojcieszak, Damian
Publicado 2023

Investigation of the Microstructure, Optical, Electrical and Nanomechanical Properties of ZnOx Thin Films Deposited by Magnetron Sputtering

por Mazur, Michał, Obstarczyk, Agata, Posadowski, Witold, Domaradzki, Jarosław, Kiełczawa, Szymon, Wiatrowski, Artur, Wojcieszak, Damian, Kalisz, Małgorzata, Grobelny, Marcin, Szmidt, Jan
Publicado 2022