Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

por Nguyen, Chi Thang, Cho, Eun-Hyoung, Gu, Bonwook, Lee, Sunghee, Kim, Hae-Sung, Park, Jeongwoo, Yu, Neung-Kyung, Shin, Sangwoo, Shong, Bonggeun, Lee, Jeong Yub, Lee, Han-Bo-Ram
Publicado 2022

Publisher Correction: Gradient area-selective deposition for seamless gap-filling in 3D nanostructures through surface chemical reactivity control

por Nguyen, Chi Thang, Cho, Eun-Hyoung, Gu, Bonwook, Lee, Sunghee, Kim, Hae-Sung, Park, Jeongwoo, Yu, Neung-Kyung, Shin, Sangwoo, Shong, Bonggeun, Lee, Jeong Yub, Lee, Han-Bo-Ram
Publicado 2023