Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

por Nian, Laixia, Qu, Yuanhang, Gu, Xiyu, Luo, Tiancheng, Xie, Ying, Wei, Min, Cai, Yao, Liu, Yan, Sun, Chengliang
Publicado 2023

Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator

por Qu, Yuanhang, Luo, Tiancheng, Wen, Zhiwei, Wei, Min, Gu, Xiyu, Chen, Xiang, Zou, Yang, Cai, Yao, Liu, Yan, Sun, Chengliang
Publicado 2023