Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry

por Claessens, Niels, Khan, Zamran Zahoor, Haghighi, Negin Rahnemai, Delabie, Annelies, Vantomme, André, Vandervorst, Wilfried, Meersschaut, Johan
Publicado 2022